期刊
MEDICAL ENGINEERING & PHYSICS
卷 35, 期 10, 页码 1399-1405出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.medengphy.2013.03.012
关键词
MEMS; Seismic sensor; Middle ear microphone; Implant
资金
- Austrian Research Promotion Agency [812091]
- province of Lower Austria
- European Regional Development Fund
This paper presents a design guideline for matching a fully implantable middle ear microphone with the physiology of human hearing. The guideline defines the first natural frequency of a seismic sensor placed at the tip of the manubrium mallei with respect to the frequency-dependence hearing of the human ear as well as the deflection of the ossicular chain. A transducer designed in compliance with the guideline presented reduces the range of the output signal while preserving all information obtained by the ossicular chain. On top of a output signal compression, static deflections, which can mask the tiny motions of the ossicles, are reduced. For guideline verification, a microelectromechanical system (MEMS) based on silicon on insulator technology was produced and tested. This prototype is capable of resolving 0.4 pm /root Hz. with a custom made read-out circuit. For a bandwidth of 0.1 kHz, this deflection is comparable with the lower threshold of speech (approximate to 40 phon). (C) 2013 Published by Elsevier Ltd on behalf of IPEM.
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