Fuzzy Control and Connected Region Marking Algorithm-Based SEM Nanomanipulation

The interactive nanomanipulation platform is established based on fuzzy control and connected region marking (CRM) algorithm in SEM. The 3D virtual nanomanipulation model is developed to make up the insufficiency of the 2D SEM image information, which provides the operator with depth and real-time visual feedback information to guide the manipulation. The haptic device Omega3 is used as the master to control the 3D motion of the nanopositioner in master-slave mode and offer the force sensing to the operator controlled with fuzzy control algorithm. Aiming at sensing of force feedback during the nanomanipulation, the collision detection method of the virtual nanomanipulation model and the force rending model are studied to realize the force feedback of nanomanipulation. The CRM algorithm is introduced to process the SEM image which provides effective position data of the objects for updating the virtual environment (VE), and relevant issues such as calibration and update rate of VE are also discussed. Finally, the performance of the platform is validated by the ZnO nanowire manipulation experiments.