期刊
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
卷 88, 期 -, 页码 273-277出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2018.08.010
关键词
MIM capacitors; Time-dependent-dielectric-breakdown; Hafnium oxide; High-K; Thin-film transistors
类别
资金
- Mexican Council of Science and Technology (CONACYT) Mexico [291159]
- CONACYT Mexico [252415]
- CONACYT Mexico
- DARPA Young Faculty Award United States
- DARPA [D13AP00049]
- Center for Engineering Innovation
In this work, we investigate the electrical behavior and reliability of thin-film devices using a high-k dielectric on top of softening polymer. Hafnium oxide (HfO2) 50 nm thick was used for gate dielectric in both capacitors and thin-film transistors (TFTs) and is deposited by atomic layer deposition at 100 degrees C. A thermoset thiol-ene/acrylate shape memory polymer (SMP) is used as flexible substrate with softening properties. The SMP belongs to a class of mechanically active materials used to store a metastable shape and return to a globally stable shape upon activation by stimuli, such as temperature, which softens the polymer via a decrease in storage modulus. An average dielectric constant of 13.6 was obtained for the HfO2 layer after an annealing treatment at 200 degrees C for two hours in forming gas. Here, a clear dependence between the electrical behavior and the device dimensions was observed. In the same experimental process, indium-gallium-zinc-oxide TFTs with different dimensions were fabricated showing mobility values of approximately 17 cm(2)/V-s, presenting similar dependence on channel dimensions. Finally, the lifetime projection of the HfO2 film was estimated from a time-dependent-dielectric-breakdown and leakage current analysis.
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