期刊
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
卷 19, 期 -, 页码 32-39出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2013.11.038
关键词
AC conductivity; Dielectric constants; Complex electric modulus
In this paper, we report some physical properties of Sb2S3 thin films obtained through thermal treatment of Sb thin films under a sulfur atmosphere at temperature 300 degrees C. X-ray diffraction indicated that Sb2S3 thin films were crystallized in orthorhombic structure. The electrical conductivity, conduction mechanism, dielectric properties and relaxation model of this thin film were indeed studied using impedance spectroscopy technique in the frequency range 5 Hz-13 MHz at various temperatures (578-638 K). Besides, the frequency and temperature dependence of the complex impedance, AC conductivity and complex electric modulus has been investigated. (C) 2013 Elsevier Ltd. All rights reserved.
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