期刊
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS
卷 181, 期 -, 页码 77-85出版社
ELSEVIER
DOI: 10.1016/j.mseb.2013.11.009
关键词
Magnesium films; Magnetron sputtering; Optical constants; Spectroscopic ellipsometry; Plasmonics; Film texture
资金
- National Science Foundation under NSF-MRSEC program [DMR-1121252]
- NSF DMR Award [DMR-0854166]
- University of Utah
The optical properties of pure nanostructured magnesium films deposited on glass, Si and GaAs substrates using DC magnetron sputtering are examined in this work to determine the potential of Mg as plasmonic material in the ultraviolet (UV) to near-infrared (NIR) spectral range. Using film thicknesses ranging from 210 to 910 nm, the corresponding optical constants over the wavelength range of 250-1700 nm were measured using a variable angle spectroscopic ellipsometer and these results are compared to reference Al thin films. The optical constants of Mg depend on the film thickness. From the perspective of plasmonics applications, we find that the best values are observed in this work for the 910 nm thick Mg film on glass substrates. The film morphology and structure of the Mg films were characterized using atomic force microscopy, scanning electron microscopy, stylus profilometry and X-ray diffraction. The optical dielectric constants and plasmonic figures of merit are strongly influenced by the film structure. The results show that smooth and [0 0 02] textured magnesium films have extremely low loss, superior or comparable to aluminum films in portions of the UV spectrum. (C) 2013 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据