期刊
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING
卷 527, 期 16-17, 页码 4447-4457出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.msea.2010.03.100
关键词
TiSiN coatings; Multilayer thin films; Transmission electron microscopy (TEM); Nanoindentation; Deformation structure
类别
资金
- Australian Microscopy and Microanalysis Research Facility (AMMRF)
- Innovation and Technology Fund (ITF) of Hong Kon [ITS/082/06]
The effects of introducing thin-TiN sublayers into TiSiN nanocomposite coatings on the deformation mechanisms imparted by both uni-axial indentation and scratch contacts were evaluated by examining cross-sections of the deformed samples. Nanoindentation testing shows that the monolithic TiSiN coating is much harder than the monolithic TiN. The indentation hardness of the multilayer samples increased with the thickness of the TiSiN sublayer in the TiSiN/TiN multilayer coatings. The density of catastrophic cracks in the coatings was largely reduced when relatively ductile TiN sublayers were introduced to form the TiSiN/TiN multilayers, as a larger portion of deformation is accommodated within them. It was observed that some of the TiN grains extended into the neighboring TiSiN sublayers. The orientation of these grains helped to inhibit the growth of cracks. To summarize, the TiN sublayers helped to maintain the structural integrity by reducing the degree of catastrophic damage in the harder TiSiN sublayers. (C) 2010 Elsevier B.V. All rights reserved.
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