期刊
APPLIED SURFACE SCIENCE
卷 346, 期 -, 页码 574-579出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2015.04.058
关键词
Three-beam laser interference; Hexagonal structures; Antireflection; Self-cleaning; Solar cell
类别
资金
- National Key Basic Research Program of China (973 Program) [2012CB326406]
- International Science and Technology Cooperation Program of China [2012DFA11070]
- National Natural Science Foundation Program of China [60940035, 61176002]
- Doctoral Program of Higher Education of China [20112216110002]
- Jilin Provincial Science and Technology Program [201024, 201115157, 20110704, 20140414009GH]
This paper demonstrates antireflective structures on silicon wafer surfaces with hydrophobic property fabricated by three-beam laser interference. In this work, a three-beam laser interference system was set up to generate periodic micro-nano hole structures with hexagonal distributions. Compared with the existing technologies, the array of hexagonally-distributed hole structures fabricated by three-beam laser interference reveals a design guideline to achieve considerably low solar-weighted reflectance ( SWR) in the wavelength range of 300-780 nm. The resulting periodic hexagonally-distributed hole structures have shown extremely low SWR (1.86%) and relatively large contact angle (140 degrees) providing with a self-cleaning capability on the solar cell surface. (C) 2015 Elsevier B.V. All rights reserved.
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