Dielectric behavior of lead lanthanum zirconate titanate thin films deposited on different electrodes/substrates

The dielectric properties of lead lanthanum zirconate titanate (PLZT) thin films are investigated on different combinations of bottom electrode (Pt, LaNiO3) and substrate (Ni, Si). The results indicate strong effects of electrode on the permittivity and dielectric loss of these PLZT thin-films capacitors. The substrate-induced thermal strain has a great impact on the temperature dependence of the dielectric behavior. Based on these findings, dielectric applications using PLZT thin films in a wide range of temperature are possible by selecting appropriate electrodes and substrates. (C) 2013 Published by Elsevier B.V.