Preparing transparent conductive Sn/Sb-O2-x thin films by annealing bi-layer Sb/SnO2 with pulse UV laser

Sb/SnO2 bi-layer films were prepared on glass substrates using ion beam sputtering deposition (IBSD) and radio frequency (RF) magnetron sputtering deposition technology. The as-deposited hi-layer films were irradiated with a pulsed ultraviolet (UV) laser beam at 355 nm for the characteristic modulation which is expected to receive interest in the subtle transition. The effect of laser irradiation on the optical and electrical behavior and the chemical state of the films was investigated using X-ray photoelectron spectroscopy (XPS). The conductivity of Sb/SnO2 after laser irradiation increased in comparison with that of SnO2 and as-deposited Sb/SnO2 thin films. The optical transmittance of laser irradiated Sb/SnO2 increased from 41% to 47%. (C) 2011 Elsevier B.V. All rights reserved.