期刊
MATERIALS LETTERS
卷 65, 期 7, 页码 1117-1119出版社
ELSEVIER
DOI: 10.1016/j.matlet.2011.01.033
关键词
Silicon nanowire; Inductively coupled plasma CVD; Optical absorption; Solar cell
资金
- National Natural Science Foundation of China [60776009]
- Natural Science Foundation of Gansu Province [096RJZA056]
Silicon nanowires were prepared by vapor-liquid-solid (VIS) mechanism at a growth temperature as low as 380 degrees C in an inductively coupled plasma chemical vapor deposition system. The nanowires consist of crystalline core surrounded by a thick amorphous silicon shell. An increase in plasma power produces dense and long nanowires with thick amorphous shell, accompanied with a thick uncatalyzed amorphous silicon film on the silicon substrate. Small catalyst nanoparticles are easier activated by plasma to grow the dense and thin nanowires in comparison with the large-size nanoparticles. Moreover, an enhanced optical absorption is achieved clue to the strong light trapping and anti-reflection effects in the thin and tapered silicon nanowires with high density. (C) 2011 Elsevier B.V. All rights reserved.
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