4.6 Article

Dielectric strength and reliability of ferroelectric PLZT films deposited on nickel substrates

期刊

MATERIALS LETTERS
卷 63, 期 15, 页码 1353-1356

出版社

ELSEVIER SCIENCE BV
DOI: 10.1016/j.matlet.2009.03.021

关键词

Ferroelectric film; Reliability; Lead lanthanum zirconate titanate; Highly accelerated lifetime test; Breakdown strength

资金

  1. U.S. Department of Energy [DE-AC02-06CH11357]

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We have deposited ferroelectric (FE) Pb0.92La0.08Zr0.52Ti0.48O3 (PLZT) films on nickel substrates by chemical solution deposition. Energy density of approximate to 46 J/cm(3) has been measured with 1.15-mu m-thick PLZT/LNO/Ni film-on-foil capacitors. A series of highly accelerated lifetime tests were performed to determine the reliability of these FE film-on-foil capacitors under high temperature and high field stress. Samples were exposed to temperatures ranging from 100 to 150 degrees C and electric fields ranging from 8.7 x 10(5) V/cm to 1.3 x 10(6) V/cm. The breakdown behavior of the FE PLZT film-on-foil capacitors was evaluated by Weibull analysis. The activation energy was determined to be approximate to 0.35 eV when an electric field of 1.05 x 10(6) V/cm was applied. The voltage acceleration factor was approximate to-6.3 at 100 degrees C. The mean time to failure was projected to be >3000 h at 100 degrees C with a dc electric field of approximate to 2.6 x 10(5) V/cm. (C) 2009 Elsevier B.V. All rights reserved.

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