4.3 Article

Thermally Induced Mesophase Development in Ethanesilica Films via Macromolecular Templating Approach

期刊

MACROMOLECULAR RESEARCH
卷 17, 期 9, 页码 697-702

出版社

POLYMER SOC KOREA
DOI: 10.1007/BF03218930

关键词

mesoporous thin film(s); block copolymer template(s); organosilicate(s); structural rearrangement

资金

  1. Korea Science and Engineering Foundation (KOSEF) [R17-2007059-01000-0]
  2. Ministry of Education, Science and Technology (MEST) [RI5-2003-032-02002-0]
  3. Korean Collaborative Project for Excellence in Basic System IC Technology

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Mesoporous ethanesilica thin film was prepared using PEO-PLGA-PEO triblock copolymers as structure-directing agents and (1,2-bis(triethoxysilyl) ethane BTESE; bridged organosilicates) as inorganic precursors via one-step sol-gel condensation of ethanesilica precursors. The mesostructure of ethanesilica films is critically dependent on the processing experimental parameters after the hydrolyzed silica sol mixture was spin-cast. This study examined the effects of the block copolymer template/organosilica precursor ratio in the casting solution and aging period before calcination of the mesostructure. It was further demonstrated that mesoscopic ordering of organosilicate thin films is induced by the rearrangement of block copolymer template/organosilica hybrid during thermal decomposition of the PEO-PLGA-PEO triblock copolymer. The mesoporous structure and morphology were characterized by SAXS, TEM and solid-state NMR measurement.

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