期刊
MACROMOLECULAR RAPID COMMUNICATIONS
卷 31, 期 16, 页码 1449-1455出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/marc.201000117
关键词
functional materials; lithography; mechanical properties; polycarbonates; synthesis
资金
- Intel Corporation
- Australian Research Council's (ARC) [LP0989607]
- Queensland State Government
- Australian Research Council [LP0989607] Funding Source: Australian Research Council
A series of high-performance polycarbonates have been prepared with glass-transition temperatures and decomposition temperatures that are tunable by varying the repeat-unit chemical structure. Patterning of the polymers with extreme UV lithography has been achieved by taking advantage of direct photoinduced chain scission of the polymer chains, which results in a molecular-weight based solubility switch. After selective development of the irradiated regions of the polymers, feature sizes as small as 28.6 nm have been printed and the importance of resist-developer interactions for maximizing image quality has been demonstrated.
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