A monolithic resonant terahertz sensor element comprising a metamaterial absorber and micro-bolometer

In this article a monolithic resonant terahertz sensor element with a noise equivalent power superior to that of typical commercial room temperature single pixel terahertz detectors and capable of close to real time read-out rates is presented. The detector is constructed via the integration of a metamaterial absorber and a micro-bolometer sensor. An absorption magnitude of 57% at 2.5 THz, a minimum NEP of 37 pW/root Hz and a thermal time constant of 68 ms for the sensor are measured. As a demonstration of detector capability, it is employed in a practical Nipkow terahertz imaging system. The monolithic resonant terahertz detector is readily scaled to focal plane array formats by adding standard read-out and addressing circuitry enabling compact, low-cost terahertz imaging.