4.8 Article

Lithium niobate on insulator (LNOI) for micro-photonic devices

期刊

LASER & PHOTONICS REVIEWS
卷 6, 期 4, 页码 488-503

出版社

WILEY-V C H VERLAG GMBH
DOI: 10.1002/lpor.201100035

关键词

Lithium niobate; lithium niobate on insulator; crystal ion slicing; wafer bonding; thin films; waveguides; integrated optics; photonic devices

资金

  1. ETH Research Grants [TH-13/05-2, TH-21/07-1]
  2. Swiss National Science Foundation [200020-119961]
  3. RITA Program [025646]
  4. Deutsche Forschungsgemeinschaft (DFG)
  5. Swiss National Science Foundation (SNF) [200020-119961] Funding Source: Swiss National Science Foundation (SNF)

向作者/读者索取更多资源

The state-of-the-art of high-refractive-index-contrast single-crystalline thin lithium niobate (LiNbO3) films as a new platform for high-density integrated optics is reviewed. Sub-micrometer thin LiNbO3 films are obtained by ion-slicing. They can be bonded by two different techniques to a low-index substrate to obtain lithium niobate on insulator (LNOI) even as wafer of 3 diameter. Different micro-and nano-structuring techniques have been used to successfully develop micro-photonic devices. To be specific, the fabrication and characterization of LNOI photonic wires with cross-section < 1 mu m(2), periodically poled LNOI photonic wires for second harmonic generation, electro-optically tunable microring resonators, free standing microrings for hybrid integration, and photonic crystal structures are described.

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