期刊
LASER & PHOTONICS REVIEWS
卷 6, 期 4, 页码 488-503出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/lpor.201100035
关键词
Lithium niobate; lithium niobate on insulator; crystal ion slicing; wafer bonding; thin films; waveguides; integrated optics; photonic devices
资金
- ETH Research Grants [TH-13/05-2, TH-21/07-1]
- Swiss National Science Foundation [200020-119961]
- RITA Program [025646]
- Deutsche Forschungsgemeinschaft (DFG)
- Swiss National Science Foundation (SNF) [200020-119961] Funding Source: Swiss National Science Foundation (SNF)
The state-of-the-art of high-refractive-index-contrast single-crystalline thin lithium niobate (LiNbO3) films as a new platform for high-density integrated optics is reviewed. Sub-micrometer thin LiNbO3 films are obtained by ion-slicing. They can be bonded by two different techniques to a low-index substrate to obtain lithium niobate on insulator (LNOI) even as wafer of 3 diameter. Different micro-and nano-structuring techniques have been used to successfully develop micro-photonic devices. To be specific, the fabrication and characterization of LNOI photonic wires with cross-section < 1 mu m(2), periodically poled LNOI photonic wires for second harmonic generation, electro-optically tunable microring resonators, free standing microrings for hybrid integration, and photonic crystal structures are described.
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