4.6 Article

Dynamics of Wicking in Silicon Nanopillars Fabricated with Interference Lithography and Metal-Assisted Chemical Etching

期刊

LANGMUIR
卷 28, 期 31, 页码 11465-11471

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AMER CHEMICAL SOC
DOI: 10.1021/la302262g

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  1. Singapore-MIT Alliance
  2. National University of Singapore
  3. GLOBALFOUNDRIES

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The capillary rise of liquid on a surface, or wicking, has potential applications in biological and industrial processes such as drug delivery, oil recovery, and integrated circuit chip cooling. This paper presents a theoretical study on the dynamics of wicking on silicon nanopillars based on a balance between the driving capillary forces and viscous dissipation forces. Our model predicts that the invasion of the liquid front follows a diffusion process and strongly depends on the structural geometry. The model is validated against experimental observations of wicking in silicon nanopillars with different heights synthesized by interference lithography and metal-assisted chemical etching techniques. Excellent agreement between theoretical and experimental results, from both our samples and data published in the literature, was achieved.

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