A vapor-assisted method for adhering polydimethylsiloxane and glass

A straightforward and inexpensive method to increase the adhesion strength of polydimethylsiloxane (PDMS) and glass is described. In this method the targeted PDMS-glass sample is exposed to a fluoroalkyl trichlorosilane vapor in an enclosed container for a certain time. It is experimentally shown that the adhesion strength of the resulted interface depends on the exposure duration. Permanently bonded PDMS-glass interfaces were reliably achieved upon sufficient exposure to the vapor. This vapor-assisted method for adhering PDMS and glass does not require any special skill or equipment and therefore can be implemented at any laboratory. This method can be used for the simultaneous bonding of components and is suitable for the mass production of microfluidic devices.