期刊
LAB ON A CHIP
卷 9, 期 8, 页码 1128-1132出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/b817925e
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- University of California
- Howard Hughes Medical Institute (HHMI) Integrating Medicine
In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 mu m resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 mm precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.
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