期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
卷 27, 期 1, 页码 472-475出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.3077185
关键词
-
This article investigates the breakdown of high-k/metal gate stacks under substrate injection regime. It is shown that it is initiated by a field driven breakdown of the interfacial layer (IL). Furthermore, because it is very sensitive to IL thickness variations, T-BD optimization supposes a control of the high-k deposition process that can induce IL thickness fluctuations. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3077185]
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据