相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。Growth and printability of multilayer phase defects on extreme ultraviolet mask blanks
Ted Liang et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2007)
Vacancy coalescence during oxidation of iron nanoparticles
Andreu Cabot et al.
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY (2007)
Oxidation and reduction of ultrathin nanocrystalline ru films on silicon: Model system for Ru-capped extreme ultraviolet lithography optics
Y. B. He et al.
JOURNAL OF PHYSICAL CHEMISTRY C (2007)
The evolution of model catalytic systems; studies of structure, bonding and dynamics from single crystal metal surfaces to nanoparticles, and from low pressure (< 10(-3) Torr) to high pressure (> 10(-3) Torr) to liquid interfaces
Gabor A. Somorjai et al.
PHYSICAL CHEMISTRY CHEMICAL PHYSICS (2007)
Surface phenomena related to mirror degradation in extreme ultraviolet (EUV) lithography
Theodore E. Madey et al.
APPLIED SURFACE SCIENCE (2006)
Oxidation resistance and microstructure of ruthenium-capped extreme ultraviolet lithography multilayers
Sasa Bajt et al.
JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS (2006)
Etching of ruthenium coatings in O-2- and Cl-2-containing plasmas
CC Hsu et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2006)
Formation of hollow nanocrystals through the nanoscale Kirkendall Effect
YD Yin et al.
SCIENCE (2004)
Visualization of atomic processes on ruthenium dioxide using scanning tunneling microscopy
H Over et al.
CHEMPHYSCHEM (2004)
Design and performance of capping layers for extreme-ultraviolet multilayer mirrors
SA Bajt et al.
APPLIED OPTICS (2003)
Catalytic CO oxidation over ruthenium - bridging the pressure gap
H Over et al.
PROGRESS IN SURFACE SCIENCE (2003)
The increasing importance of the use of ozone in the microelectronics industry
F De Smedt et al.
OZONE-SCIENCE & ENGINEERING (2002)
Two-dimensional oxide on Pd(111)
E Lundgren et al.
PHYSICAL REVIEW LETTERS (2002)
Atomic imaging of the transition between oxygen chemisorption and oxide film growth on Ag{111}
CI Carlisle et al.
SURFACE SCIENCE (2000)