期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
卷 36, 期 5, 页码 -出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.5040457
关键词
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资金
- European Commission within the FP7 research project Roll-to-roll manufacturing of high efficiency and low-cost flexible CIGS solar modules [283974 R2R-CIGS]
Zinc oxysulfide (ZnOS) is synthesized at atmospheric pressure in a laboratory-scale spatial atomic layer deposition setup by sequentially exposing the substrate to diethyl zinc and an H2O/H2S mixture, separated by a nitrogen gas curtain. The co-injection of H2O and H2S vapors in the same deposition zone enables an accurate control of the S/(O + S) ratio, the morphology, and the optoelectronic properties of the films Next, the ZnOS deposition process is transferred to an industrial roll-to-roll spatial-ALD setup. ZnOS is applied as a buffer layer in flexible Cu(In,Ga)Se-2 solar cells, instead of the commonly used CdS, achieving a best efficiency of typically 13% in small area cells (0.57 cm(2)) and 9.2% in flexible mini-modules (270 cm(2)). These results show the viability of atmospheric spatial-ALD as a new technique for roll-to-roll manufacturing of flexible photovoltaics modules based on a Cu(In,Ga)Se-2 absorber. Published by the AVS.
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