期刊
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION
卷 27, 期 11, 页码 2423-2431出版社
OPTICAL SOC AMER
DOI: 10.1364/JOSAA.27.002423
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- ASML B.V.
This paper extends the area of application of the Fourier modal method (FMM) from periodic structures to aperiodic ones, in particular for plane-wave illumination at arbitrary angles. This is achieved by placing perfectly matched layers at the lateral sides of the computational domain and reformulating the governing equations in terms of a contrast field that does not contain the incoming field. As a result of the reformulation, the homogeneous system of second-order ordinary differential equations from the original FMM becomes non-homogeneous. Its solution is derived analytically and used in the established FMM framework. The technique is demonstrated on a simple problem of planar scattering of TE-polarized light by a single rectangular line. (C) 2010 Optical Society of America
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