期刊
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
卷 62, 期 8, 页码 1176-1182出版社
KOREAN PHYSICAL SOC
DOI: 10.3938/jkps.62.1176
关键词
ZnSnO; Ga; Sol-gel; TFTs
资金
- Ministry of Knowledge Economy (MKE), Korea [10041808, 10041947]
- Ministry of Knowledge Economy (MKE), Korea, under the Korea Institute for Advancement of Technology (KIAT) through the Workforce Development Program in Strategic Technology
- Basic Science Research Program through the National Research Foundation of Korea (NRF)
- Ministry of Education, Science and Technology [2012011424]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10041947] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
We investigated the incorporation of Ga into zinc-tin-oxide (ZTO) thin-film transistors (TFTs) and assessed the TFTs' electrical and stability properties. The Ga-doped ZTO (ZTO:Ga) thin films were deposited on thermally oxidized silicon substrates by using a sol-gel technique. The Ga contents were varied from 1 to 20 atomic percent (at.%) while the Zn:Sn ratio was maintained at 1:1. The dependence of the ZTO:Ga thin films' structural properties on the Ga content was analyzed using Xray diffraction (XRD) spectra, scanning probe microscopy (SPM), X-ray photoelectron spectroscopy (XPS), and UV-visible spectrophotometry. The field effect mobilities and the I (on) /I (off) ratios of the ZTO:Ga-TFTs were between 0.68 and 2.95 cm(2)Vs(-1)s(-1) and similar to 10(4) and similar to 10(6), respectively. At low Ga contents, the (< 10-at.%) TFTs displayed similar TFT parameters, but the 20-at.%-Ga TFT showed improved mobility and stability characteristics. Moreover, the 20-at.%-Ga thin film had a smoother surface and increased crystallinity than the low Ga-content samples did.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据