期刊
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
卷 32, 期 16, 页码 4381-4391出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.jeurceramsoc.2012.08.007
关键词
Aluminum doped zinc oxide (AZO); Electrical conductivity; Sintering; Final microstructure; Films
资金
- Portuguese Agency of Innovation (Adi) [QREN/3435-Nanoxides]
- European Commission (ERC) [228144]
- Portuguese Science Foundation [Pest-C/CTM/LA0025/2011]
This work reports the production of ceramic targets based on nanostructured Al-doped ZnO (AZO) powders for sputtering applications. The nanostructured powder is obtained by a new patented process based on the detonation of an emulsion containing both Zn and Al metal precursors in the final proportion of 98:2 wt% (ZnO:Al2O3), through which the Al contains is highly uniform distributed over ZnO. Due to the nanostructured powder characteristics, the targets can be sintered at substantially lower temperatures (1150-1250 degrees C) by conventional sintering, contributing to production costs reduction of ceramic targets and consequently the costs of photovoltaic and displays industries. Electrical resistivity values around 3.0-7.0 x 10(-3) Omega cm have been obtained depending on final microstructure of the targets. The electro-optical properties of the films produced at room temperature with thicknesses around 360 nm, besides being highly uniform exhibit a resistivity of about 1 x 10(-3) Omega cm and a transmittance in the visible range above 90%. (C) 2012 Elsevier Ltd. All rights reserved.
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