Changes in Carrier Concentration and Debye Length: Experimental Evidence from van der Pauw Hall Measurements on NOx Sensing of In2O3

Changes in conductivity, carrier concentration and mobility of In2O3 thin film on exposure to NO at different temperatures were measured using van der Pauw technique. The species responsible for these changes were probed by laser Raman spectroscopic technique. The direct correlation between the adsorbed species and the observed changes in the electrical properties of In2O3 thin film toward NOx as a function of temperature had been elucidated. (C) 2014 The Electrochemical Society. All rights reserved.