期刊
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
卷 159, 期 4, 页码 F87-F90出版社
ELECTROCHEMICAL SOC INC
DOI: 10.1149/2.007205jes
关键词
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资金
- Laboratory Directed Research and Development (LDRD) program
- National Institute of Nano Engineering (NINE) at Sandia National Laboratories
- U.S. Department of Energy's National Nuclear Security Administration [DE-AC04-94AL85000]
An electrochemical probe station (EPS) for automated electrochemical testing of electronic-grade thin films is presented. Similar in design to a scanning droplet cell, this modular system features a flexible probe tip capable of contacting both metallic and oxide surfaces. Using the highly sensitive Pt-H2SO4 system, it is demonstrated that the EPS obtains results equivalent to those of a traditional electrochemical cell. Further, electrical testing of thin film PbZr0.52Ti0.48O3 shows that this system may be used to ascertain fundamental electrical properties of dielectric films. (C) 2012 The Electrochemical Society. [DOI: 10.1149/2.007205jes] All rights reserved.
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