Conduction Properties and a Long-Term Stability of the Transparent Capacitors

The conduction mechanism and the reliability by a damp heat-treatment in transparent Al(0.016)In(0.003)Zn(0.981)O (AIZO)/Bi(2)Mg(2/3)Nb(4/3)O(7) (BMN)/AIZO/glass capacitors were investigated for transparent capacitor applications. The conduction mechanism of the transparent AIZO/BMN/AIZO capacitors was governed by a Schottky emission with a Schottky barrier height of 0.25-0.53 eV. The reliability of the transparent capacitors by a damp heat-treatment was investigated for dielectric, optical, and leakage properties. The AIZO top electrode and the BMN dielectrics in the transparent capacitor structure were influenced by a damp heat-treatment for 800 h. Although the transparent capacitors were influenced by a damp heat-treatment, the dielectric, optical, and leakage properties of the capacitors satisfied the requirement for the reliability of the transparent capacitors. (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3491369] All rights reserved.