期刊
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
卷 157, 期 2, 页码 A237-A241出版社
ELECTROCHEMICAL SOC INC
DOI: 10.1149/1.3272640
关键词
alumina; aluminium; carbon nanotubes; chemical vapour deposition; electrodes; electrolytic capacitors; nanofabrication; nanoporous materials; sputter deposition
资金
- National Science Council of the Republic of China [NSC97-2622-E-224-008-CC3]
Carbon nanotubes (CNTs) were directly grown on nanoporous alumina templates/aluminum foil by chemical vapor deposition using different temperatures and times. Next, aluminum was sputtered onto the nanoporous alumina templates with grown CNTs/aluminum foil with grown CNTs by varying the sputtering time and power. Finally, aluminum oxide was formed by anodizing in an ammonium adipate solution. A higher capacitance (2159 mu F/cm(2)) as well as a superior operation voltage (55.10 V) with the pore bottom of the alumina templates as a substrate and a higher capacitance (3426 mu F/cm(2)) as well as a superior operation voltage (38.44 V) with an aluminum foil substrate were obtained at better/the best CNT growing conditions (600 degrees C/60 min) and better sputtering conditions (65 W and 4 h). Furthermore, the higher the CNT growing temperature, the higher the capacitance. The capacitance decreased with increasing sputtering power and time, but the operation voltage increased with increasing sputtering power and time.
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