期刊
APPLIED PHYSICS LETTERS
卷 106, 期 4, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4906373
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资金
- National Research Foundation of Korea (NRF) - Ministry of Science, ICT and Future Planning [2012R1A2A1A03006049]
- Global Frontier Research Center for Advanced Soft Electronics through the National Research Foundation of Korea (NRF) - Ministry of Science, ICT and Future Planning [2013M3A6A5073170]
- ICT R&D Program - Institute for Information & Communication Technology Promotion, Korea [10041066]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10041066] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The fabrication and the characteristics of an inorganic silicon-based flexible tactile sensor equipped with active-matrix circuitry compatible with a batch microfabrication process are reported. An 8 x 8 array of 260 nm-thick silicon strain gauges along with individual thin film transistor switches was built on a plastic substrate with 1 mm spacing, corresponding to a human spatial resolution at the fingertip. We demonstrated that the sensor shows excellent performances in terms of repeatability of 1.1%, hysteresis of 1.0%, scanning speed of as much as 100 kHz and resolution of 12.4 kPa while maintaining low power consumption and signal crosstalk through a series of experiments. (C) 2015 AIP Publishing LLC.
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