期刊
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
卷 135, 期 18, 页码 6778-6781出版社
AMER CHEMICAL SOC
DOI: 10.1021/ja401785h
关键词
-
资金
- AFOSR Young Investigator Program [FA9550-13-1-0083]
- Mascaro Center for Sustainable Innovation
- Central Research Development Fund of the University of Pittsburgh
- DARPA [N66001-11-1-4136]
- ONR [N000141110914, N000141010827]
- NSF CAREER Award [CCF1054898]
- Division of Computing and Communication Foundations
- Direct For Computer & Info Scie & Enginr [1054898] Funding Source: National Science Foundation
We describe a method to form custom-shaped inorganic oxide nanostructures by using DNA nanostructure templates. We show that a DNA nanostructure can modulate the rate of chemical vapor deposition of SiO2 and TiO2 with nanometer-scale spatial resolution. The resulting oxide nanostructure inherits its shape from the DNA template. This method generates both positivetone and negative-tone patterns on a wide range of substrates and is compatible with conventional silicon nanofabrication processes. Our result opens the door to the use of DNA nanostructures as general-purpose templates for high-resolution nanofabrication.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据