期刊
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
卷 132, 期 7, 页码 2106-+出版社
AMER CHEMICAL SOC
DOI: 10.1021/ja9098005
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资金
- National Science Foundation [CHE07-50422, DMR-0420768]
- PG Research Foundation
- U.S. Department of Energy [DEFG02-91-ER45439]
- Division Of Chemistry
- Direct For Mathematical & Physical Scien [0750422] Funding Source: National Science Foundation
New lanthanide CVD precursors of stoichiometry Ln(H3BNMe2BH3)(3) have been prepared, where Ln = La, Ce, Pr, Nd. Sm, Gd, Tb, Dy, Ho, Er, Tm, and Lu. The ligand is N,N-dimethylaminodiboranate, a new kind of multidentate borohydride. The structures of the Ln(H3BNMe2BH3)(3) complexes are highly dependent on the size of the lanthanide ions: the coordination number decreases from Pr (CN = 14) to Sm (CN = 13) to Er (CN = 12) corresponding with the decrease in ionic radii. The Ln(H3BNMe2BH3)(3) complexes are highly volatile and sublime at temperatures as low as 65 degrees C in vacuum. These complexes are useful CVD precursors; for example, Y(H3BNMe2BH3)(3) has been used to deposit Y2O3 on silicon at 300 degrees C by CVD using water as a coreactant.
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