期刊
APPLIED PHYSICS LETTERS
卷 106, 期 16, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4919113
关键词
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资金
- NSF grant through MRSEC [DMR 1119826]
- DARPA ORCHID program through a grant from the Air Force Office of Scientific Research [AFOSR FA9550-10-1-0297]
- AFOSR MURI [FA9550-15-1-0029]
- U.S. Army Research Office [W911NF-14-1-0563]
- Packard Foundation
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [0846919] Funding Source: National Science Foundation
We report on the advance of chip-scale cavity optomechanical resonators to beyond 10 GHz by exploiting the fundamental acoustic thickness mode of an aluminum nitride micro-disk. By engineering the mechanical anchor to minimize the acoustic loss, a quality factor of 1830 and hence a frequency-quality factor product of 1.9 x 10(13) Hz are achieved in ambient air at room temperature. Actuated by strong piezo-electric force, the micro-disk resonator shows an excellent electro-optomechanical transduction efficiency. Our detailed analysis of the electro-optomechanical coupling allows identification and full quantification of various acoustic modes spanning from super-high to X-band microwave frequencies measured in the thin film resonator. (C) 2015 AIP Publishing LLC.
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