Elasto-Capillary Folding Using Stop-Programmable Hinges Fabricated by 3D Micro-Machining

We show elasto-capillary folding of silicon nitride objects with accurate folding angles between flaps of (70.6 +/- 0.1)degrees and demonstrate the feasibility of such accurate micro-assembly with a final folding angle of 90 degrees. The folding angle is defined by stop-programmable hinges that are fabricated starting from silicon molds employing accurate three-dimensional corner lithography. This nano-patterning method exploits the conformal deposition and the subsequent timed isotropic etching of a thin film in a 3D shaped silicon template. The technique leaves a residue of the thin film in sharp concave corners which can be used as an inversion mask in subsequent steps. Hinges designed to stop the folding at 70.6 degrees were fabricated batchwise by machining the V-grooves obtained by KOH etching in (110) silicon wafers; 90 degrees stop-programmable hinges were obtained starting from silicon molds obtained by dry etching on (100) wafers. The presented technique has potential to achieve any folding angle and opens a new route towards creating structures with increased complexity, which will ultimately lead to a novel method for device fabrication.