期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 24, 期 2, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/24/2/025025
关键词
rate coefficients; argon; resonance states; 2p states; electron-impact excitation
资金
- Ministry of Science and Technology of China [2011ZX02403]
- National Natural Science Foundation of China [10935006, 10775087]
- Advanced Micro-Fabrication Equipment Inc.
- Samsung Electronics Co. Ltd.
The rate coefficients of electron-impact excitation from argon 1s(2) and 1s(4) (resonance states) to 2p states are determined in the electron temperature (T-e) range of 0.5-1.1 eV. This is achieved by using a population model for Ar(2p) and measured parameters in the afterglow of an rf (60 MHz) pulsed capacitive discharge. These parameters include the densities of the 2p states (optical emission spectroscopy), the densities of the four argon 1s states (diode laser absorption), and T-e (a Langmuir probe and a line-ratio technique), for discharges with two gas mixtures: Ar(60mTorr)/O-2(2mTorr) and Ar(60mTorr)/Xe(1.8mTorr). It is found that the rate coefficients obtained in this work agree well with those from the cross sections by a large-scale R-matrix calculation reported recently by Zatsarinny et al (2004 J. Phys. B: At. Mol. Opt. Phys. 37 4693, 2014 Phys. Rev. A 89 022706).
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