Confocal full-field X-ray microscope for novel three-dimensional X-ray imaging

A confocal full-field X-ray microscope has been developed for use as a novel three-dimensional X-ray imaging method. The system consists of an X-ray illuminating 'sheet-beam' whose beam shape is micrified only in one dimension, and an X-ray full-field microscope whose optical axis is normal to the illuminating sheet beam. An arbitral cross-sectional region of the object is irradiated by the sheet-beam, and secondary X-ray emission such as fluorescent X-rays from this region is imaged simultaneously using the full-field microscope. This system enables a virtual sliced image of a specimen to be obtained as a two-dimensional magnified image, and three-dimensional observation is available only by a linear translation of the object along the optical axis of the full-field microscope. A feasibility test has been carried out at beamline 37XU of SPring-8. Observation of the three-dimensional distribution of metallic inclusions in an artificial diamond was performed.