Scanning-Probe-Induced Local Decomposition of Solid Germanium Monoxide Films: The Nano-Pattering of Germanium

The possibility of forming the Ge-based wires with the nanoscale's lateral resolution using the local modification of GeO((sol)) films by a scanning probe microscope was demonstrated for the first time. The property of the solid germanium monoxide films, namely, their metastability, was used to decompose the GeO film on Ge and GeO(2) by running the high-density electric current under the probe of the atomic force microscope.