4.5 Article

Nondestructive evaluation of high-temperature elastic modulus of 3C-SiC using Raman scattering

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JOURNAL OF RAMAN SPECTROSCOPY
卷 43, 期 7, 页码 945-948

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WILEY
DOI: 10.1002/jrs.3119

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SiC; Raman; modulus; high temperature; chemical vapor deposition

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A nondestructive method is reported to measure the high-temperature modulus of 3C-SiC coating and bulk samples using Raman scattering. Within the temperature range from 20?degrees C to 900?degrees C, both the longitudinal optical and transverse optical phonon frequencies decrease linearly as the temperature increases. The elastic moduli derived from the longitudinal optical phonon agree with previous results measured using other techniques. It is further shown that the grain size and impurity only have a negligible effect on the elastic modulus of 3C-SiC. Copyright (c) 2011 John Wiley & Sons, Ltd.

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