相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Micro-Raman and Spreading Resistance Analysis on Beveled Implanted Germanium for Layer Transfer Applications
Paul Rainey et al.
ELECTROCHEMICAL AND SOLID STATE LETTERS (2011)
Activation of Implanted n-Type Dopants in Ge Over the Active Concentration of 1 X 10(20) cm(-3) Using Coimplantation of Sb and P
Jeehwan Kim et al.
ELECTROCHEMICAL AND SOLID STATE LETTERS (2010)
Implantation-induced damage in Ge: strain and disorder profiles during defect accumulation and recovery
S. Decoster et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2009)
Surface blistering of low temperature annealed hydrogen and helium co-implanted germanium and its application to splitting of bonded wafer substrates
R. E. Hurley et al.
VACUUM (2009)
Germanium on sapphire substrates for system on a chip
H. S. Gamble et al.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2008)
Characterization of hydrogenated amorphous germanium compounds obtained by x-ray chemical vapor deposition of germane: Effect of the irradiation dose on optical parameters and structural order
Aldo Arrais et al.
JOURNAL OF APPLIED PHYSICS (2007)
Surface blistering of low-temperature annealed hydrogen and helium co-implanted silicon and its application to splitting of bonded wafer substrates
R. E. Hurley et al.
VACUUM (2007)
Role of hydrogen in hydrogen-induced layer exfoliation of germanium
J. M. Zahler et al.
PHYSICAL REVIEW B (2007)
Hydrogen implantation-induced defects in bulk Si studied by Raman spectrometry
C. Villeneuve et al.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2006)
Extended-type defects created by high temperature helium implantation into silicon
MF Beaufort et al.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2006)
Study of extended-defect formation in Ge and Si after H ion implantation
T Akatsu et al.
APPLIED PHYSICS LETTERS (2005)
Hydrogen-induced platelets in Ge determined by Raman scattering
M Hiller et al.
PHYSICAL REVIEW B (2005)
FT-IR and XPS analysis of a-Si1-xGex:H thin films
MN Makadsi et al.
RENEWABLE ENERGY (2003)
Evaluation of crystalline germanium thin films electrodeposited on copper substrates from propylene glycol electrolyte
M Saitou et al.
SURFACE & COATINGS TECHNOLOGY (2003)
Compact hydrogenated amorphous germanium films by ion-beam sputtering deposition
D Comedi et al.
JOURNAL OF NON-CRYSTALLINE SOLIDS (2000)
Interaction of atomic hydrogen with a Ge(111) surface: low-energy electron diffraction and surface Raman studies
C Su et al.
SURFACE SCIENCE (2000)
分享论文
