期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 121, 期 2, 页码 443-449出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-015-9073-8
关键词
-
资金
- Defense Advanced Research Projects Agency (DARPA) of the United States Department of Defense
In this review, we describe the use of nanoimprint lithography in our group to fabricate plasmonic platforms with nanometer-scale critical features that would be significantly more expensive using other fabrication techniques: 3-D cones that have tips with a sub-10 nm radius of curvature, active polygonal nanofingers with sub-2 nm spacing, and deterministic nanoparticle assemblies both on arbitrary substrates and in solution. These nanostructures were primarily designed to make surface-enhanced Raman Scattering a viable analytical technique for low-level chemical and biological contaminants, but the same fabrication methods should also be useful for other nanophotonic and nanoelectronic applications.
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