期刊
JOURNAL OF POWER SOURCES
卷 269, 期 -, 页码 520-525出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jpowsour.2014.06.135
关键词
Lithium ion battery; Silicon anode; Silicon nitride; Composite anode
资金
- WSU
- NSF [1229635]
- DOE
- Richard Barber Foundation
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [1229635] Funding Source: National Science Foundation
Silicon nitride thin films deposited by plasma enhanced chemical vapor deposition (PECVD) were evaluated for their performance as lithium ion battery anodes. PECVD is a mature technique in the semiconductor industry, but has been less utilized in battery research. We show that PECVD is a powerful tool to control the chemical composition of battery materials and its corresponding specific capacity. A 250 nm nitride anode was shown to have a stable reversible caPacity of 1800 mAh g(-1) with 86% capacity retention after 300 cycles. The capacity dropped for thicker films (1 mu m), where it retained 76% after 100 cycles. The high reversible capacity of the PECVD nitride anode was attributable-to a conductive Li3N matrix and excellent adhesion between PECVD films and copper current collectors. (C) 2014 Elsevier B.V. All rights reserved.
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