期刊
JOURNAL OF POWER SOURCES
卷 225, 期 -, 页码 240-244出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jpowsour.2012.10.020
关键词
Carbide derived carbon; Micro-supercapacitors; MEMS; Electrochemical capacitor
资金
- Partnership Universities Fund (PUF)
- U.S. Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering [DE-FG02-07ER46473]
- U.S. Department of Energy (DOE) [DE-FG02-07ER46473] Funding Source: U.S. Department of Energy (DOE)
Interdigitated on-chip micro-supercapacitors based on Carbide Derived Carbon (CDC) films were fabricated and tested. A titanium carbide (TiC) film was patterned and treated with chlorine to obtain a TiC derived carbon (TiC-CDC) film, followed by the deposition of two types of current collectors (Ti/Au and Al) using standard micro-fabrication processes. CDC based micro-supercapacitors were electrochemically characterized by cyclic voltammetry and impedance spectroscopy using a I M tetraethylammonium tetrafluoroborate, NEt4BF4, in propylene carbonate (PC) electrolyte. A capacitance of 0.78 mF for the device and 1.5 mF cm(-2) as the specific capacitance for the footprint of the device was measured for a 2 V potential range at 100 mV s(-1). A specific energy of 3.0 mJ cm(-2) and a specific power of 84 mW cm(-2) were calculated for the devices. These devices provide a pathway for fabricating pure carbon-based micro-supercapacitors by micro-fabrication, and can be used for powering micro-electromechanical systems (MEMS) and electronic devices. (C) 2012 Elsevier B.V. All rights reserved.
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