期刊
PHYSICS OF THE SOLID STATE
卷 57, 期 10, 页码 2093-2098出版社
PLEIADES PUBLISHING INC
DOI: 10.1134/S1063783415100029
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资金
- Russian Foundation for Basic Research [14-08-90010 Bel_a]
- Belarusian Republican Foundation for Basic Research [T14R-165]
- State task in the scientific activity sphere [16.1154.2014/K]
The specific features of the formation of nanocrystalline ZnO films by pulsed laser deposition have been studied at different target-substrate distances. Expressions for estimating the temperature, particle concentration, and pressure in the laser ablation plume have been obtained. The effect of these parameters on electrical properties of nanocrystalline ZnO films grown by pulsed laser deposition has been estimated. The feasibility of the controlled growth of nanocrystalline ZnO films with a surface roughness of similar to 2-15 nm, grain diameters of 70-620 nm, and resistivities in the range of (1.75-5.3) x 10(-3) Omega cm has been demonstrated.
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