Synthesis of Well-Defined and End-Polymerizable Star-Shaped Polysulfides and Their Application to Negative Photoresist

Various star-shaped poly(phenoxy propylene sulfide) s (PPSs) bearing curable end groups were synthesized by the functionalization of the propagating ends of star-shaped poly(PPS) with various electrophilies. The functionalization with chloromethyl styrene proceeded quantitatively, and afforded polymers with M-n almost agreed with theoretical value and narrow M-w/M-n. The photocuring conditions were optimized, and the addition of 10 wt % of poly(ethylene glycol) diacrylate was effective to attain sufficient crosslinking. The photocuring reaction of the end-functionalized poly(PPS) films cast on silicon wafers was conducted by UV irradiation. The cured poly (PPS) s became insoluble in THF, supporting the sufficient crosslinking. Developing of a cured polymer yielded a negative photoresist pattern. (C) 2010 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 48: 4385-4392, 2010