期刊
JOURNAL OF PHYSICS-CONDENSED MATTER
卷 22, 期 45, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0953-8984/22/45/454134
关键词
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资金
- National Institutes of Health [R21EB006149, R21EB007480]
- NYSTAR [TTIP C020040]
- ARO [DAAD19-03-1-0267]
- National Science Foundation [DMR0722653, ECCS 0707795]
Porous nanocrystalline silicon (pnc-Si) membranes are a new class of solid-state ultra-thin membranes with promising applications ranging from biological separations to use as a platform for electron imaging and spectroscopy. Because the thickness of the membrane is only 15-30 nm, on the order of that of the molecules to be separated, mass transport through the membrane is greatly enhanced. For applications involving molecular separations, it is crucial that the membrane is highly permeable to some species while being nearly impermeable to others. An important approach to adjusting the permeability of a membrane is by changing the size and density of the pores. With pnc-Si, a rapid thermal treatment is used to induce nanopore formation in a thin film of nanocrystalline silicon, which is then released over a silicon scaffold using an anisotropic etchant. In this study, we examine the influence of thin film deposition and thermal treatment parameters on pore size and density.
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