期刊
JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷 47, 期 49, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0022-3727/47/49/495205
关键词
argon; rate coefficients; 1s states; afterglow
资金
- Ministry of Science and Technology of China [2011ZX02403]
- National Natural Science Foundation of China [10935006, 10775087]
- Advanced Micro-Fabrication Equipment Inc.
- Samsung Electronics Co. Ltd.
Electron-impact transfer rate coefficients, from Ar(1s(5)) to Ar(1s(4)) and from Ar(1s(3)) to Ar(1s(2)), are obtained in the afterglow of a capacitive discharge. The discharge is generated by a pulsed 13.56 MHz rf power source with 20 m Torr argon. The densities of the four argon 1s states are measured by diode laser absorption, the electron temperature (T-e) is measured by a Langmuir probe and the electron density is measured by both the probe and a microwave interferometer. Using the measured parameters and a kinetic model for Ar metastable states in the afterglow, the electron-impact transfer rate coefficients are determined in a T-e range of 0.25-1.0eV. It is found that the obtained rate coefficients agree well with those from the R-matrix calculation.
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