期刊
JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷 46, 期 17, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0022-3727/46/17/175202
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资金
- Belgian Government through the 'Pole d'Attraction Interuniversitaire' (PAI) [P7/34]
- Opti2mat program [DG06]
Resonant optical absorption of ground state Ce atoms is demonstrated. Ce I resonant emission line at 461.05 nm (A(ij) = 28 x 10(8) s(-1)) corresponding to the transition 4f5d6s(2)-4f(2)((1)G)5d (I-2)6s is utilized. In a magnetron sputtering discharge used as an atomic source, the absolute densities of atomic ground state Ce sputtered in pure Ar and in Ar-O-2 (oxidized magnetron cathode) gas mixtures are found to be nearly 2 x 10(8) cm(-3) (pure Ar) and 1 x 10(7) cm(-3) (Ar + O-2). The phenomena inherent in reactive sputtering, such as the non-oxidized-oxidized regime transition and the hysteresis of the transition point, are detected. The obtained data are compared with the existing results of a similar absorption analysis performed in the Ti dc magnetron discharges. The discrepancies in the obtained Ce and Ti absolute ground state densities are analysed.
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