Investigation of the effect of metastable atoms on mode transition in argon inductive discharge via a hybrid model

By using an improved hybrid Monte Carlo/fluid model with the metastable solver and power deposition scheme, we investigate the dynamic characteristics of metastable atoms and their influences on plasma conditions during mode transition, and moreover explore its role in hysteresis by searching the nonlinear mechanism. The evolution behaviours of metastable atoms with power deposition at different pressures are traced. Besides, the effects of metastable atoms and multistep ionization on the variation of plasma parameters, e. g. electron density, temperature and energy distribution function, etc, during the transition are systematically examined. When cycling the inputted electrical parameters, coil current and voltages, hysteresis does not appear. The basic characteristic of plasma dynamics during mode transition is not significantly influenced by the presence of metastable atoms. Moreover, a linearly increasing slope of plasma density with the deposited power is observed and no evidence of nonlinear mechanisms is detected.