期刊
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
卷 123, 期 -, 页码 266-270出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.jpcs.2018.08.009
关键词
TiO2; Anatase; Rutile; Spectroscopic ellipsometry; Optical band gap
资金
- Basic Science Research Program through the National Research Foundation of Korea - Ministry of Education [2018R1D1A1B07050201]
- Priority Research Centers and Basic Science Research Program through the NRF - Ministry of Education [2009-0093818]
- Ministry of Trade, Industry and Energy, Korea Institute for Advancement of Technology through the Encouragement Program for the Industries of Economic Cooperation Region [R0005393]
- Korea Evaluation Institute of Industrial Technology (KEIT) [R0005393] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [2018R1D1A1B07050201, 2009-0093818, 21A20131100002] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The optical properties of TiO2 thin films with polymorphs were investigated by spectroscopic ellipsometry (SE) and transmittance measurements. Films were prepared by RF sputtering and e-beam evaporation and post annealing, and their microstructures were examined by SEM and XRD. The results reveal that the crystal structure of the TiO2 film is strongly affected by the post-annealing temperature. The optical constant spectra of the films showed a gradual change above 3.5 eV. As the crystal structure of the film changes from amorphous phase to rutile phase, the extinction coefficient spectra are enhanced and shift toward lower energy. The direct band gap energies obtained by SE measurements were well matched with those obtained by transmittance measurements. The SE analysis was supported by comparison of the measured and calculated transmittances of the films, and both spectra showed good agreement over the entire spectral range.
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