4.5 Article

Fiber-based distance sensing interferometry

期刊

APPLIED OPTICS
卷 54, 期 10, 页码 3051-3063

出版社

OPTICAL SOC AMER
DOI: 10.1364/AO.54.003051

关键词

-

类别

资金

  1. Deutsche Forschungsgemeinschaft through the Technische Universitat Munchen-International Graduate School of Science and Engineering
  2. Technische Universitat Munchen-Institute for Advanced Studies - German Excellence Initiative (focus group Nanoimprint and Nanotransfer)
  3. European Union (project Diadems)

向作者/读者索取更多资源

We present an interferometric displacement sensor based on a folded low-finesse Fabry-Perot cavity. The fiber-optic sensor uses a quadrature detection scheme based on the wavelength modulation of a DFB laser. This enables measuring position changes over a range of 1 m for velocities up to 2 m/s. The sensor is well suited to work in extreme environments such as ultrahigh vacuum, cryogenic temperatures, or high magnetic fields and supports multichannel applications. The interferometer achieves a repeatability of 0.44 nm(3 sigma) at a working distance of 20 mm, a resolution of 1 pm, and an accuracy of 1 nm. (C) 2015 Optical Society of America

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.5
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据