期刊
APPLIED OPTICS
卷 54, 期 10, 页码 3051-3063出版社
OPTICAL SOC AMER
DOI: 10.1364/AO.54.003051
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资金
- Deutsche Forschungsgemeinschaft through the Technische Universitat Munchen-International Graduate School of Science and Engineering
- Technische Universitat Munchen-Institute for Advanced Studies - German Excellence Initiative (focus group Nanoimprint and Nanotransfer)
- European Union (project Diadems)
We present an interferometric displacement sensor based on a folded low-finesse Fabry-Perot cavity. The fiber-optic sensor uses a quadrature detection scheme based on the wavelength modulation of a DFB laser. This enables measuring position changes over a range of 1 m for velocities up to 2 m/s. The sensor is well suited to work in extreme environments such as ultrahigh vacuum, cryogenic temperatures, or high magnetic fields and supports multichannel applications. The interferometer achieves a repeatability of 0.44 nm(3 sigma) at a working distance of 20 mm, a resolution of 1 pm, and an accuracy of 1 nm. (C) 2015 Optical Society of America
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