Randomized Benchmarking of Single-Qubit Gates in a 2D Array of Neutral-Atom Qubits

We characterize single-qubit Clifford gate operations with randomized benchmarking in a 2D array of neutral-atom qubits and demonstrate global and site selected gates with high fidelity. An average fidelity of F-2 = 0.9983(14) is measured for global microwave-driven gates applied to a 49-qubit array. Single-site gates are implemented with a focused laser beam to Stark shift the microwaves into resonance at a selected site. At Stark selected single sites we observe F-2 = 0.9923(7) and an average spin-flip crosstalk error at other sites of 0.002(9).